Small size, modular design, light weight, up to 6 inch wafer, for I-V/C-V, PIV, optoelectronic tests, applicable to glove box
CS-4 | 4" chuck for basic I-V/C-V test
Features / Application
◆ For I-V/C-V, PIV, optoelectronic test;
◆ Up to 6 inch wafer ;
◆ Precise screw drive structure, linear movement;
◆ Modular design, light weight.
Specifications
Chuck Stage
Chuck size
4"/ 6"
Rotation range
360° with angle locking, 0.1μm resolution fine-tuning
X-Y travel range
4" * 4"/ 6" * 6"
X-Y travel resolution
10μm/2μm/0.7μm/0.5μm
Z travel range
10mm
Sample mounting
Vacuum
Stage capacity
Up to 6 micropositioner
Dimension
400mm(L)*400mm(W)*500mm(H)
Optical system
|
Magnification |
16~200X |
|
Travel range |
360° horizontal rotation，vertical to 50.8mm |
|
Illumination |
Coaxial and ring light |
|
CCD Camera |
HDMI interface, built-in XcanView |
Micropositioner
X-Y-Z travel range
12mm-12mm-12mm
Adsorption mode
Magnetic/ vacuum
Mechanical resolution
10μm / 2μm/0.7μm/0.5μm
Leakage current
10pA /100fA
Cable connector
BNC/Banana head /Crocodile clip / Coaxial / Triaxial
Probe tip diameter
0.5μm/1μm/2μm/5μm/10μm/20μm
Probe metal
Tungsten/ Beryllium copper
Optional accessories
|
Hot chuck |
|
Shielding box |
|
Display screen |
|
Gold coating chuck |
|
Special adapter |
|
Vibration free table |
|
RF testing accessoriess |
Notice:
Probe stations can be customized to customer requirements.
Specifications and designs are subject to change without notice.
|
All Rights Reserved. Shenzhen Cindbest Technology Co., Ltd |
Shenzhen Cindbest Technology Co., Ltd
Add: 8F Weihuada Industrial Park No.5 Lirong Rd Xinshi Com Dalang St Longhua Dist Shenzhen,China
Tel: 0755-29412885 E-mail: aldrich@cindbest.com; |
